AIRMOUNT DESING AND CALCULATION PROCESS-ASML

AIRMOUNT

1. TT-PM-AM-4v0
ASML Confidential
20-Dec-2007 For Training Purposes Only/ Slide 1
TWINSCAN Airmounts
TT-PM-AM
PERIODIC MAINTENANCE

2. ASML Confidential
20-Dec-2007/ Slide 2 For Training Purposes Only
COPYRIGHT
©2007,ASMLHoldingN.V.(includingaffiliates).Allrightsreserved.
Thispublicationissubjecttochangewithoutnoticeandcontainsconfidentialandproprietary
informationofASMLHoldingN.V.oritsaffiliates("ASML").
Thisdocumentationisfortheintendedpurposeonlyandfortheuseoftheintendedrecipientonly.
Pleaseretaincontrolofthisdocumentation.Itisnottobeforwardedordistributed.Any
unauthorizedreview,copying,use,disclosureordistributionisstrictlyprohibited.Thematerial
hereinisprovided"AS-IS"ANDASMLmakesnowarrantyofanykindwithregardtothismaterial.
ASMLshallnotbeliableforerrorsandomissionscontainedherein.
Trademarks
ASML,ASMLithography,TWINSCAN, MASKRIGGER, MASKWEAVER, LITHOCRUISER,
ATHENA,QUASAR,IRIS,MICRALIGN,PAS5500,PAS5000,3DAlign,2DStitching,3DMetrology,
andtheASMLlogoaretrademarksofASMLHoldingN.V.oraffiliatecompanies.Thetrademarks
maybeusedeitheraloneorincombinationwithafurtherproductdesignation.
StarlithandAerialaretrademarksofCarlZeiss.
Nothinginthispublicationisintendedtomakerepresentationswithregardtowhetherany
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3. ASML Confidential
20-Dec-2007/ Slide 3 For Training Purposes Only
Module Goal
The goal of this module is to support your practice in the
clean room.
We will:
review the hardware components
preview the scheduled practice exercises
discuss the purpose, performance, function and expected
results of the checks and tests to be accomplished.

4. ASML Confidential
20-Dec-2007/ Slide 4 For Training Purposes Only
Module Objectives
Airmounts
State the Purpose of an Airmount
State the Functions of the Airmount System
Locate the Three Airmounts
Identify Airmount Components
PALM (Piezo Active Lens Mount)
State the Purpose of the PALM system
State the Location of the PALM system
Identify PALM Components

5. ASML Confidential
20-Dec-2007/ Slide 5 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities

6. ASML Confidential
20-Dec-2007/ Slide 6 For Training Purposes Only
Purpose of the Airmount Subsystem
Isolate Metroframe from Vibrations

7. ASML Confidential
20-Dec-2007/ Slide 7 For Training Purposes Only
Airmount Function
Five functions of an airmount:
Isolate the Metroframe silent world from the
external world
Support the Metro frame at a fixed height
Maintain the metrology frame in a central
horizontal position
Actively dampen oscillations of the Metroframe
Provide airmount status and measurement
feedback data

8. ASML Confidential
20-Dec-2007/ Slide 8 For Training Purposes Only
Airmounts isolatethe metro frame from the vibrations of the outside world
The metro frame
supports the lens and
related imaging components.
Air mounts support the Metrology frame

9. ASML Confidential
Maintain the metrology frame in a central horizontal
position
20-Dec-2007/ Slide 9 For Training Purposes Only

10. ASML Confidential
20-Dec-2007/ Slide 10 For Training Purposes Only
Airmount 3
Airmount 1
Airmount 2
Front of
Machine
Airmounts Location On The Base Frame

11. ASML Confidential
20-Dec-2007/ Slide 11 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities

12. ASML Confidential
20-Dec-2007/ Slide 12 For Training Purposes Only
Components-Overview of anAirmount
Proximity Sensors
Restrictor
Top Plate
Main plate
Airbearing
Motor Water cooling in/out
Servo Valve
Motors
Geophones
0.5 Liter Tank
Filter
Locking Bolts

13. ASML Confidential
20-Dec-2007/ Slide 13 For Training Purposes Only
Main Plate
Mounts on Baseframe
Provides Support for Airmount Components

14. ASML Confidential
20-Dec-2007/ Slide 14 For Training Purposes Only
Air Bearing
Cylinder
Floats on Air
Provides Horizontal Freedom of
Motion
Piston
Floats Inside Cylinder
Provides Z lifting to support Metro
Frame
Curved Pin Interfaces Top Plate

15. ASML Confidential
20-Dec-2007/ Slide 15 For Training Purposes Only
Airmount Air Volume
30 Liter Air Volume
Provide Air Cushion
Separate External World
Vibrations
Note-Different Shapes Due to
Space Limitations
Air Volume for
Airmount 1
Air Volume for
Airmounts 2 & 3

16. ASML Confidential
20-Dec-2007/ Slide 16 For Training Purposes Only
Top Plate and Support
Connected to Metroframe
Hardened Support Interfaces Pin in Piston
Support Point

17. ASML Confidential
20-Dec-2007/ Slide 17 For Training Purposes Only
Centering Ring
Piston contains a centering ring
Top plate support interface pin falls inside centering ring
Keeps Piston & cylinder centered to top plate support
interface when Airmount air is switched off
Centering ring

18. ASML Confidential
20-Dec-2007/ Slide 18 For Training Purposes Only
Lorentz Motors
Horizontal (100N maximum)
Vertical (20 N maximum)
Horizontal
Motor
VerticalMotor

19. ASML Confidential
20-Dec-2007/ Slide 19 For Training Purposes Only
Servo Valve
Pneumatic Valve
Regulates Air Entering
Airmount
Dither Signal
Air Tank
0.5 Liter Tank
Buffers Dither pressure
variations from Airmount

20. ASML Confidential
20-Dec-2007/ Slide 20 For Training Purposes Only
Proximity Sensors
•Measure Metroframe
Position
•Sensor Mounted on
Baseframe
•Reference Mounted on
Top Plate (or is Top Plate
Itself)
•One Sensor for Vertical,
One for Horizontal
Horizontal
proximity sensor
Vertical
proximity sensor
Horizontal
reference plate
Top plate is
vertical reference

21. ASML Confidential
20-Dec-2007/ Slide 21 For Training Purposes Only
Geophone Sensors
Measure Motion and
Acceleration of the
Metroframe
Assembly Contains a
Vertical and a Horizontal
Sensor

22. ASML Confidential
20-Dec-2007/ Slide 22 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities

23. ASML Confidential
20-Dec-2007/ Slide 23 For Training Purposes Only
Base
Frame
Metro Frame
Lens
R-chuck
E-chuck
PALM (3x)
Purpose & Location Of PALM
Active Damping of Lens
vibrations
External Vibrations
Internal Vibrations
Location
In between Lens and Metro
Frame
PALM
PALM
PALM

24. ASML Confidential
20-Dec-2007/ Slide 24 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities

25. ASML Confidential
20-Dec-2007/ Slide 25 For Training Purposes Only
PALM Sensor/Actuator Assy
Piezo Crystals
(sensors & actuators
Connected to Lens
Connected to Metro
Frame

26. ASML Confidential
20-Dec-2007/ Slide 26 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities

27. ASML Confidential
20-Dec-2007/ Slide 27 For Training Purposes Only
Electronics
ELEctronicsCabinet(ELEC)
SUCR
ELEC

28. ASML Confidential
20-Dec-2007/ Slide 28 For Training Purposes Only
Electronics
Airmount SUspension Control Rack (SUCR)
Main AM Processor
AM Power Amplifiers
PALM Controller Actuator Board (PCAB)
Power Supplies
AM Processor
Power Supplies
Power Amplifiers
PALM Processor

29. ASML Confidential
20-Dec-2007/ Slide 29 For Training Purposes Only
Airmount & PALM Summary
Airmounts:
3 Airmounts
Isolates the Metroframe from the external world
Actively dampen oscillations of the Metroframe
Airmount stabilize Metroframe in X, Y, Z Position
Airmount air bearing delivers main force to carry Metro
Frame
Metro Frame position is determined by horizontal &
vertical Lorentz motors
PALM supports the lens and actively dampens lens
vibrations
SUCR is the Electronics rack for Airmounts & PALM

30. ASML Confidential
20-Dec-2007/ Slide 30 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities
Safety
Activities introduction

31. ASML Confidential
20-Dec-2007/ Slide 31 For Training Purposes Only
Safety
Every maintenance function has related safety items
Each procedure lists the safety hazards and warnings
possibly encountered when performing the procedure.
In addition, all common precautions that pertain to
working on TWINSCAN systems must be considered.
These include, but are not limited to, UV radiation,
Electrical, Magnetic fields, Mechanical and the safe use
of Solvents (IPA, Acetone).
Read a procedure all the way through before starting
Hazards that must be considered when performing each
procedure will be indicated with a symbol and a printed
warning.

32. ASML Confidential
20-Dec-2007/ Slide 32 For Training Purposes Only
Subjects
Airmount Purpose, Function & Location
Airmount Components
PALM Purpose, Function & Location
PALM Components
Electronics
Lab activities
Safety
Activities introduction

33. ASML Confidential
20-Dec-2007/ Slide 33 For Training Purposes Only
Lab Activities
Periodic Maintenance (PM) Twinscan training is
designed around the Yearly Periodic Maintenance
tasks.
For Airmounts and PALM no specific tasks are designed
Some non-PM related activities are defined for the PM
training and will be explained by your instructor.

34. ASML Confidential
20-Dec-2007/ Slide 34 For Training Purposes Only
Retrieve performance data from the system
Learn where Airmounts Performance data are stored
Be able to copy those files (using UNIX commands)
Test reports
/usr/asm/atl.3481/service_data/test_data/Airmounts/
For Instance:
/usr/asm/atl.3481/service_data/test_data/
Airmounts/PerformanceTests/MASP
Graphical Displayer files
/usr/asm/atl.3481/service_data/
For Instance:
/usr/asm/atl.3481/service_data/MA/..../

35. ASML Confidential
20-Dec-2007/ Slide 35 For Training Purposes Only
Questions?