Phase_1_lam_research_internship_ppt.pptx

about internship

1. I nternship at LAM Research RV College of Engineering Go, change the world 18TEP81 : BE Major Project Phase I Presentation Sumukha S Srivatsa 1RV19ET055 Guide Name: Dr. K. Nagamani Designation: Professor Department of Electronics and Telecommunication Engineering * Department of ETE 1

2. About the organization Introduction Motivation Problem Statement Objectives of the project Literature Survey Methodology Project timeline References RV College of Engineering Outline Go, change the world * Department of ETE 2

3. Lam Research Corporation is a global supplier of semiconductor manufacturing equipment and services. The company was founded in 1980 and is headquartered in Fremont, California, United States. Lam Research designs, manufactures, markets, and services a range of products used in the production of integrated circuits. The company is one of the largest suppliers of wafer fabrication equipment and services to the semiconductor industry worldwide. Engineering Intern in the LIST(Lam India Software Technologies) department under the DM team. RV College of Engineering About the O rganization Go, change the world * Department of ETE 3

4. LIST platforms 1. c2c3 2. nexus 3. 2300 4. CIP team handles system and modules C2C3 has DEP, ETCH and Clean teams. The Dep team - vapour deposition, plasma chemical vapour deposition and direct metal deposition. System Architecture : UI - > System controller ( QNX ) ---(TCP/IP)--- > Module controller ( Qnx ) ----RS232----> IOCs----(SPI/I2C) ---  Hardware devices Hardware devices : sensors, valves, spindles, switches, MFC (mass flow controllers), gauges, LFC (liquid flow controllers), turbo pumps, lift pins, spindles RV College of Engineering Introduction Go, change the world * Department of ETE 4

5. System controller and module controllers work and co-ordinate using a distributed Real time operating system (RTOS) . They communicate with each other through wireless communication protocols and with the devices through serial and parallel communication protocols. It is responsible for maintaining the right conditions for the chemical reactions to take place effectively like maintaining the temperature, pressure, inputting the right number of gases like silane, ammonia, nitrogen, diborane hexafluoride etc. RV College of Engineering Introduction Go, change the world * Department of ETE 5

6. When the customer wants to create a new recipe/ chemistry to produce the required chip, there arises a need to add new gases which needs to monitor carefully using devices like mass flow controllers, pressure gauges and valves . Adding software contr ol to these devices allows the process engineers to easily control the flow and conditions of the reaction chamber with precision . Avoiding the re-deposition of elements on the wafer if any of the subsequent processes in the recipe break down decreases the wafer scrap rate and increases the reliability of the program. When there are multiple processes running at different stations simultaneously with different temperatures, pressures, elements and chemistry, the throughput of the entire system increases thereby producing higher production rate and profits for the fabricator. This is an upgrade over the previous system where all stations had to be at same temperature and pressure which would limit the number of possible chemistry techniques that could be applied RV College of Engineering Motivation Go, change the world * Department of ETE 6

7. Introducing a new feature to allow configuration of new pressure gauges to monitor pressures of 2 important gases needed for CVD on the divert lines. Subsequently, a configuration setting is to be allowed where the users can control the flow of these gases using 2 valves which are controlled using software digitally using IOCs and digital logic which can be controlled through the UI (User Interface). Prevention of multiple depositions to happen on the same wafer in all the recipes/programs that are designed for deposition processes. Allow for more complex processes to happen simultaneously at different stations at different temperatures and pressures and use different gas combinations. This should happen with all possible permutations of the chemical technique, temperature, and pressure. RV College of Engineering Problem Statement Go, change the world * Department of ETE 7

8. The main objectives of the internship are: To understand the software architecture of the systems at Lam Research. To understand the various steps involved in the Software Product lifecycle. To understand how to cater to the needs of the customers and process engineers. To develop solutions by considering the customer requirements. To work as a team and collaborate with engineers across departments and specializations to get the product shipment ready. To understand how a product is stress tested before being shipped to customer RV College of Engineering Objectives of the Project Go, change the world * Department of ETE 8

9. RV College of Engineering Literature Survey Go, change the world * Department of ECE 9 Sl No Paper Title, Journal Name, Year Major findings / observations 1 J. A. Sethian and D. Adalsteinsson , "An overview of level set methods for etching, deposition, and lithography development," in IEEE Transactions on Semiconductor Manufacturing, vol. 10, no. 1, pp. 167-184, Feb. 1997, doi : 10.1109/66.554505. In the case of photoresist development and isotropic etching/deposition, the fast marching level set method. In the case of more complex etching and deposition, the narrow band level set method 2 J. Nduhura-Munga , G. Rodriguez- Verjan , S. Dauzère-Pérès , C. Yugma , P. Vialletelle and J. Pinaton , "A Literature Review on Sampling Techniques in Semiconductor Manufacturing," in IEEE Transactions on Semiconductor Manufacturing, vol. 26, no. 2, pp. 188-195, May 2013, doi : 10.1109/TSM.2013.2256943. Sampling techniques are classified into three main groups: static, adaptive, and dynamic Benefits and drawbacks of each group are discussed, showing significant improvements from static to dynamic through adaptive sampling techniques.

10. RV College of Engineering Literature Survey Go, change the world * Department of ECE 10 Sl No Paper Title, Journal Name, Year Major findings / observations 3 J. G. Shanthikumar , S. Ding and M. T. Zhang, "Queueing Theory for Semiconductor Manufacturing Systems: A Survey and Open Problems," in IEEE Transactions on Automation Science and Engineering, vol. 4, no. 4, pp. 513-522, Oct. 2007, doi : 10.1109/TASE.2007.906348. In this paper, open problems on queueing modeling of SMS are discussed. A potential solution is also proposed by relaxing the independent assumptions in the classical queueing theory. 4 C. Pan, M. Zhou, Y. Qiao and N. Wu, "Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges," in IEEE Transactions on Automation Science and Engineering, vol. 15, no. 2, pp. 586-601, April 2018, doi : 10.1109/TASE.2016.2642997. This paper reviews the modeling and scheduling methods for cluster tools with both nonrevisiting and revisiting processes. Future research directions and conclusions are finally discussed.

11. RV College of Engineering Literature Survey Go, change the world * Department of ETE 11 Sl No Paper Title, Journal Name, Year Major findings / observations 5 A. Grau, M. Indri, L. L. Bello and T. Sauter, "Industrial robotics in factory automation: From the early stage to the Internet of Things," IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society, Beijing, China, 2017, pp. 6159-6164, doi : 10.1109/IECON.2017.8217070. The paper addresses current and future trends, revealing the close link between the progress in industrial robotics and the parallel evolution of industrial communication systems, which represent an enabling technology for modern industrial robotics. 6 M. Pohronská and T. Krajčovič , "Embedded systems with increased reliability using the multiple watchdog timers approach," 2010 International Conference on Applied Electronics, Pilsen, Czech Republic, 2010, pp. 1-4. Watch dog timers and their critical importance in RTOS systems and use of multiple watchdog timers are examined.

12. RV College of Engineering Literature Survey Go, change the world * Department of ETE 12 Sl No Paper Title, Journal Name, Year Major findings / observations 7 Sastry, David C., and Mettin Demirci . "The QNX operating system." Computer 28.11 (1995): 75-77. Locking range enhancement techniques Target input frequency ranges of 7.8, 11.1 8 L. M. Wein, "Scheduling semiconductor wafer fabrication," in IEEE Transactions on Semiconductor Manufacturing, vol. 1, no. 3, pp. 115-130, Aug. 1988, doi : 10.1109/66.4384. A variety of input control and sequencing rules are evaluated using a simulation model of a representative but fictitious semiconductor wafer fab.

13. RV College of Engineering Literature Survey Go, change the world * Department of ETE 13 Sl No Paper Title, Journal Name, Year Major findings / observations 9 K. Ramamritham and J. A. Stankovic, "Scheduling algorithms and operating systems support for real-time systems," in Proceedings of the IEEE, vol. 82, no. 1, pp. 55-67, Jan. 1994, doi : 10.1109/5.259426. The four paradigms are: static tabledriven scheduling, static priority preemptive scheduling, dynamic planning-based scheduling, and dynamic best effort scheduling 10 Ming Huo , J. Verner, Liming Zhu and M. A. Babar, "Software quality and agile methods," Proceedings of the 28th Annual International Computer Software and Applications Conference, 2004. COMPSAC 2004., Hong Kong, China, 2004, pp. 520-525 vol.1, doi : 10.1109/CMPSAC.2004.1342889. Compare the waterfall model with agile processes to show how agile methods achieve software quality under time pressure and in an unstable requirements environment

14. RV College of Engineering Design Methodology Go, change the world * Department of ETE 14

15. “C” Programming language and MACSE API “QNX” Operating System IPLM/Jira for bug tracking Clear case for maintaining code database Release Notes Generator for feature release notes FMEA Application Portal Visual C++, Visual Studio IDEs Operating systems - Windows XP and Windows 10 C++/C#/WPF technologies for development RV College of Engineering Details of Software / Hardware Go, change the world * Department of ETE 15

16. RV College of Engineering Go, change the world * Department of ETE 16 Timeline of the Project

17. Thank You RV College of Engineering Go, change the world * Department of ETE 17