SEM3.ppt RGRGRSE ERGAER GE ERGTAE GERGERA G

HGD SEM

1. Signal Processing before image formation

3. Hence differential amplification needs to be done

23. Charging – ‘Dust particle’

25. Charging – Calcite Crystal
Latex spheres

28. Charging reduced at lower kV

27

(a) 1OKV

791 4 66

29. Vacc:0.7kV

S-4599 1.5 kV x39.8K id

Charge-up Phenomena Eliminate Charge-up

Specimen : SiO, on Photo Resist Line Pattern

31. Mirror Microscopy

A good use of
sample charging!

32. Image of Column

34. Specimen Preparation
Ideal Sample

36. Clean Sample

37. Sample Size

+ Large Specimen
+ Cutto
manageable size
* Make sure it
does not sit on
specimen stage
awkwardly
+ Cutting Specimen
+ Saws
+ Fracture
+ Knife or Scissors

38. Conductivity

«+ Mount for Electrical Contact
+ Tapes
* Al, Cuorc
Paints
+ Agorc
+ Paste
«Ag
= Coatings
+ Metals
+ Sputtering
+ Evaporation
ec
* Evaporation

40. Thick Coating

41. Explore with the Virtual Scanning Electron Microscope
Simulator (myscope-explore.org)
844_en.pdf (jeol.co.jp)
Guide to SEM Observation