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1. Teacher: Huseynov Emin Student: Mehdiyev Ilkin Group: 632.23E Profession: Processing Automation Engineering Subject: Information Technology Topic: Microelectromechanisc MEMS Micro-electromechanics MEMS

2. Plan Introduction Why MEMS matter? Structure and Components How MEMS are made? Applications of MEMS Advantages and Disadvantages of MEMS Conclusion

3. Micro-electromechanics MEMS

4. INTRODUCTION Microelectromechanical Systems (MEMS) are tiny devices that combine electrical and mechanical components. They can sense , control , and actuate on the microscale, often performing tasks like measuring movement, pressure, or temperature. MEMS are made using technology similar to that used for making computer chips. Despite their small size, they play a big role in modern technology.

5. Why MEMS matter? MEMS are important because they allow systems to be smaller, faster, and more efficient . They are often used in portable electronics like phones, fitness trackers, and medical tools. MEMS are key to smart technology — they help devices react to the world around them. For example, MEMS sensors help phones rotate the screen automatically when turned.

6. Structure and Components

7. A MEMS device often includes three main parts: Sensor – A small structure that detects changes in the environment, such as pressure, movement, or temperature. Actuator – A moving part that responds to signals. It might open a valve, move a mirror, or vibrate. Electronics – These control how the device works, process data, and send or receive signals. All of these parts are built onto a tiny chip. This combination allows MEMS to be used in smart systems with real-time responses.

8. How MEMS are made? MEMS are built using special microfabrication techniques in cleanroom environments. These processes include: Photolithography – A light-based method to create tiny patterns on the material surface Etching – Removing specific areas to shape structures Thin Film Deposition – Adding very thin layers of materials to build up components Bonding and Packaging – Sealing the device to protect it from damage

9. Applications of MEMS MEMS are used in many everyday and advanced technologies: Smartphones – for screen rotation, step counting, and image stabilization Automobiles – in airbags, tire pressure monitors, and engine systems Healthcare – in devices like pacemakers, insulin pumps, and lab-on-chip tools Aerospace – in sensors for drones and navigation systems Industry – in pressure sensors, flow controllers, and vibration monitors

10. MEMS Advantages Very small size Low power usage Fast and accurate response Can be mass produced Easily combined with digital systems These features make MEMS ideal for smart, compact, and mobile technologies.

11. MEMS Disadvantages While MEMS have many benefits, they also face some problems: Design Complexity – MEMS systems are hard to design correctly. Environmental Sensitivity – Small changes in temperature or humidity can affect their performance. Packaging – MEMS need protection from dust, moisture, and shock, which can be difficult. Cost for Custom Designs – Making special-purpose MEMS can be expensive and time-consuming.

12. Conclusion MEMS are small systems with big impact. They help machines and devices sense and respond to the environment, making technology smarter and more useful. From your phone to your car, and even in hospitals and space, MEMS are quietly working behind the scenes. Understanding how MEMS work helps us understand how modern technology is evolving.

13. THANK YOU FOR YOUR ATTENTION