MOS Capacitor

ABU SYED KUET

1. Metal–Oxide–Semiconductor Capacitor Instructor Abu Syed Md. Jannatul Islam Lecturer, Dept. of EEE, KUET, BD M O S

2. MOS C apacitor The Si MOSFET is the most important solid-state device for modern electronics. To understand its operation, we first need to understand the MOS capacitor: Source Gate Drain A S J I 4 2 9

3. Energy-band diagram of IDEAL MOS Capacitor A S J I 4 2 9

4. Accumulation in MOS for p-type Substrate Ideal MOS capacitor under accumulation bias conditions: The valence-band edge is closer to the Fermi level at the oxide–semiconductor interface than in the bulk material, which implies that there is an accumulation of holes. A S J I 4 2 9

5. The semiconductor surface appears to be more p-type than the bulk material. The Fermi level is a constant in the semiconductor since the MOS system is in thermal equilibrium and there is no current through the oxide. Accumulation in MOS for p-type Substrate A S J I 4 2 9

6. Ideal MOS capacitor under depletion bias conditions: Depletion in MOS for p-type Substrate A S J I 4 2 9

7. Figure c : shows the energy-band diagram of the MOS system when a positive voltage is applied to the gate. The conduction- and valence-band edges bend as shown in the figure, indicating a space charge region similar to that in a pn junction. The conduction band and intrinsic Fermi levels move closer to the Fermi level. The induced space charge width is X d or W . A larger negative charge in the MOS capacitor implies a larger induced space charge region and more band bending. Depletion in MOS for p-type Substrate A S J I 4 2 9

8. Ideal MOS capacitor under inversion bias conditions: I nversion in MOS for p-type Substrate A S J I 4 2 9

9. The intrinsic Fermi level at the surface is now below the Fermi level. The conduction band at the surface is now close to the Fermi level, whereas the valence band is close to the Fermi level in the bulk semiconductor . This result implies that the surface in the semiconductor adjacent to the oxide–semiconductor interface is n type. By applying a sufficiently large positive gate voltage, we have inverted the surface of the semiconductor from a p-type to an n-type semiconductor. We have created an inversion layer of electrons at the oxide–semiconductor interface. I nversion in MOS for p -type Substrate A S J I 4 2 9

10. Figure 10.7a shows the case when a positive voltage is applied to the gate and an accumulation layer of electrons is formed. Figure 10.7b shows the energy bands when a negative voltage is applied to the gate. The conduction and valence bands now bend upward indicating that a space charge region has been induced in the n-type substrate. Figure 10.7c shows the energy bands when a larger negative voltage is applied to the gate. The conduction and valence bands are bent even more and the intrinsic Fermi level has moved above the Fermi level. The valence band at the surface is now close to the Fermi level, whereas the conduction band is close to the Fermi level in the bulk semiconductor. This result implies that the semiconductor surface adjacent to the oxide–semiconductor interface is p type. By applying a sufficiently large negative voltage to the gate of the MOS capacitor, the semiconductor surface has been inverted from n type to p type. An inversion layer of holes has been induced at the oxide–semiconductor interface. MOS C apacitor with an n-type S ubstrate A S J I 4 2 9

11. Figure 10.7 | The energy-band diagram of the MOS capacitor with an n-type substrate for (a) a positive gate bias , (b) a moderate negative bias, and (c) a “ large” negative gate bias. MOS Capacitor with an n-type Substrate A S J I 4 2 9

12. Figure 10.8 shows the space charge region in a p-type semiconductor substrate.   The potential is called the surface potential; it is the difference (in V) between E Fi measured in the bulk semiconductor and E Fi measured at the surface. The surface potential is the potential difference across the space charge layer.     Depletion Layer Thickness in P-type Substrate where N a is the acceptor doping concentration and n i is the intrinsic carrier concentration . We may calculate the width of the induced space charge region adjacent to the oxide–semiconductor interface. The space charge width can now be written in a form similar to that of a one-sided pn junction. We can write that The potential is the difference (in V) between E Fi and E F and is given by   A S J I 4 2 9

13. For the condition of = 2 t he Fermi level at the surface is as far above the intrinsic level as the Fermi level is below the intrinsic level in the bulk semiconductor. The electron concentration at the surface is the same as the hole concentration in the bulk material. This condition is known as the threshold inversion point. The applied gate voltage creating this condition is known as the threshold voltage.   Threshold I nversion Point, Voltage and Maximum Depletion Width in p-type Substrate   Figure 10.9 shows the energy bands for the case in which = 2 .   In this case, then, the space charge region has essentially reached a maximum width. The maximum space charge width, X dT , at this inversion transition point can be calculated by setting = 2 . Then   A S J I 4 2 9

14. We have been considering a p-type semiconductor substrate. The same maximum induced space charge region width occurs in an n-type substrate. We can write     Note that we are always assuming the parameters fp and fn to be positive quantities .   Threshold Inversion Point, Voltage and Maximum Depletion Width in n-type Substrate Figure 10.10 | The energy-band diagram in the n-type semiconductor at the threshold inversion point. A S J I 4 2 9

15. Figure 10.13a shows the energy levels in the metal, silicon dioxide (SiO2 ), and silicon relative to the vacuum level. The metal work function is m and the electron affinity is The parameter is the oxide electron affinity and, for SiO2, 0.9 V.   Work Function Differences in p-type S ubstrate A S J I 4 2 9

16. Figure 10.13b shows the energy-band diagram of the entire MOS structure with zero gate voltage applied. The Fermi level is a constant through the entire system at thermal equilibrium. We may define as a modified metal work function—the potential required to inject an electron from the metal into the conduction band of the oxide. Similarly, is defined as a modified electron affinity. The voltage V ox0 is the potential drop across the oxide for zero applied gate voltage and is not necessarily zero because of the difference between m and . The potential is the surface potential for this case.       Work Function Differences in p -type Substrate We can define a potential as     which is known as the metal–semiconductor work function difference. If we sum the energies from the Fermi level on the metal side to the Fermi level on the semiconductor side, we have A S J I 4 2 9

17. The metal–semiconductor work function difference for this case is defined as   where is assumed to be a positive value.   Work Function Differences in n-type Substrate Figure 10.15 shows the energy-band diagram of the MOS capacitor with a metal gate and the n-type semiconductor substrate, for the case when a negative voltage is applied to the gate. A S J I 4 2 9

18. The energy bands in the semiconductor are flat indicating no net charge exists in the semiconductor. This condition is known as flat band. Flat Band Figure 10.4a shows the ideal case when zero bias is applied across the MOS device. A S J I 4 2 9

19. Because of the work function difference and possible trapped charge in the oxide, the voltage across the oxide for this case is not necessarily zero. We have implicitly been assuming that there is zero net charge density in the oxide material. This assumption may not be valid—a net fixed charge density , usually positive, may exist in the insulator. Figure 10.17 | Energy-band diagram of a MOS capacitor at flat band. Flat Band Voltage The flat-band voltage is defined as the applied gate voltage such that there is no band bending in the semiconductor and, as a result, zero net space charge in this region. Figure 10.17 shows this flat-band condition. A S J I 4 2 9

20. Oxide Charges The charges that exist in a realistic MOS structure can be classified into four different categories: Flat Band Voltage variation due to Oxide Charges A S J I 4 2 9

21. Flat Band Voltage variation due to Oxide Charges A S J I 4 2 9

22. The net fixed charge in the oxide appears to be located fairly close to the oxide– semiconductor interface. We will assume in the analysis of the MOS structure that an equivalent trapped charge per unit area, , is located in the oxide directly adjacent to the oxide–semiconductor interface. The parameter is usually given in terms of number of electronic charges per unit area. Equation (10.14), for zero applied gate voltage, can be written as     Flat Band Voltage variation due to Oxide Charges If a gate voltage is applied, the potential drop across the oxide and the surface poten tial will change. We can then write   Finally, we have   Figure 10.18 | Charge distribution in a MOS capacitor at flat band. A S J I 4 2 9

23. There is zero net charge in the semiconductor, and we can assume that an equivalent fixed surface charge density exists in the oxide. The charge density on the metal is , and from charge neutrality we have     We can relate to the voltage across the oxide by     Flat Band Voltage variation due to Oxide Charges Figure 10.18 | Charge distribution in a MOS capacitor at flat band. where C ox is the oxide capacitance per unit area . Substituting Equation (10.22) into Equation (10.23), we have   In the flat-band condition, the surface potential is zero, or = 0. Then from Equation (10.21), we have     This is the flat-band voltage for this MOS device A S J I 4 2 9

24. The threshold voltage is defined as the applied gate voltage required to achieve the threshold inversion point. The threshold inversion point, in turn, is defined as the condition when the surface potential is = 2 for the p-type semiconductor and = 2 for the n-type semiconductor . The space charge width has reached its maximum value. We will assume that there is an equivalent oxide charge and the positive charge on the metal gate at threshold is . The prime on the charge terms indicates charge per unit area.   where   Threshold Voltage for p-type Substrate Figure 10.19 | Charge distribution in a MOS capacitor with a p-type substrate at the threshold inversion point From conservation of charge, we can write A S J I 4 2 9

25. Figure 10.20 | Energy-band diagram through the MOS structure with a positive applied gate bias. Threshold Voltage for p-type Substrate As we mentioned, an applied gate voltage will change the voltage across the oxide and will change the surface potential. We had from Equation (10.20) that   At threshold, we can define = , where is the threshold voltage that creates the electron inversion layer charge. The surface potential is = at threshold , so Equation (10.20) can be written as     where is the voltage across the oxide at this threshold inversion point. The voltage can be related to the charge on the metal and to the oxide capacitance by     A S J I 4 2 9

26. where again C ox is the oxide capacitance per unit area. Using Equation (10.26), we can write Threshold Voltage for p-type Substrate   Finally, the threshold voltage can be written as   Using the definition of flat-band voltage from Equation (10.25), we can also express the threshold voltage as   A S J I 4 2 9

27. The same type of derivation can be done with an n-type semiconductor substrate , where a negative gate voltage can induce an inversion layer of holes at the oxide–semiconductor interface. The threshold voltage for this case can be derived and is given by   We may note that and are defined as positive quantities. We may also note that the notation of is the threshold voltage that will induce an inversion layer of holes .   Threshold Voltage for n-type Substrate A S J I 4 2 9

28. C – V Characteristics The MOS capacitor structure is the heart of the MOSFET. A great deal of information about the MOS device and the oxide semiconductor interface can be obtained from the capacitance versus voltage or C – V characteristics of the device. The capacitance of a device is defined as   where is the magnitude of the differential change in charge on one plate as a function of the differential change in voltage across the capacitor. The capacitance is a small-signal or ac parameter and is measured by superimposing a small ac voltage on an applied dc gate voltage. The capacitance, then, is measured as a function of the applied dc gate voltage .   A S J I 4 2 9

29. First we will consider the ideal C – V characteristics of the MOS capacitor and then discuss some of the deviations that occur from these idealized results. We will initially assume that there is zero charge trapped in the oxide and also that there is no charge trapped at the oxide–semiconductor interface. There are three operating conditions of interest in the MOS capacitor: accumulation , depletion, and inversion. Ideal C – V Characteristics A S J I 4 2 9

30. Figure 10.23 | (a) Energy-band diagram through a MOS capacitor for the accumulation mode. (b) Differential charge distribution at accumulation for a differential change in gate voltage. Accumulation Mode in p-type Substrate The capacitance C’ per unit area of the MOS capacitor for this accumulation mode is just the oxide capacitance, or   The differential changes in charge density occur at the edges of the oxide, as in a parallel-plate capacitor. A S J I 4 2 9

31. Figure 10.24 | (a) Energy-band diagram through a MOS capacitor for the depletion mode. ( b) Differential charge distribution at depletion for a differential change in gate voltage. Depletion Mode in p-type Substrate The oxide capacitance and the capacitance of the depletion region are in series. A small differential change in voltage across the capacitor will cause a differential change in the space charge width. The corresponding differential changes in charge densities are shown in the figure. The total capacitance of the series combination is   A S J I 4 2 9

32.   Depletion Mode in p-type Substrate The total capacitance of the series combination is Since = / and = /   As the space charge width increases, the total capacitance decreases. We had defined the threshold inversion point to be the condition when the maximum depletion width is reached, but there is essentially zero inversion charge density. This condition will yield a minimum capacitance , which is given by     A S J I 4 2 9

33. Figure 10.25a shows the energy-band diagram of this MOS device for the inversion condition. In the ideal case, a small incremental change in the voltage across the MOS capacitor will cause a differential change in the inversion layer charge density. The space charge width does not change. If the inversion charge can respond to the change in capacitor voltage as indicated in Figure 10.25b, then the capacitance is again just the oxide capacitance, or Inversion Mode in p-type Substrate (at low frequency)   A S J I 4 2 9

34. C-V curve for p-type Substrate (at low-frequency) The three dashed segments correspond to the three components , , and . The solid curve is the ideal net capacitance of the MOS capacitor.   Figure 10.26 shows the ideal low-frequency capacitance versus gate voltage, or C – V , characteristics of the MOS capacitor with a p-type substrate. Individual capacitance components are also shown A S J I 4 2 9

35. Moderate inversion, which is indicated in the figure, is the transition region between the point when only the space charge density changes with gate voltage and when only the inversion charge density changes with gate voltage. The point on the curve that corresponds to the flat-band condition is of interest. The flat-band condition occurs between the accumulation and depletion conditions. The capacitance at flat band is given by   We may note that the flat-band capacitance is a function of oxide thickness as well as semiconductor doping . C-V curve for p-type Substrate (at low-frequency) A S J I 4 2 9

36. The same type of ideal C – V characteristics is obtained for a MOS capacitor with an n-type substrate by changing the sign of the voltage axis. The accumulation condition is obtained for a positive gate bias and the inversion condition is obtained for a negative gate bias. This ideal curve is shown in Figure 10.27. Figure 10.27 | Ideal low-frequency capacitance versus gate voltage of a MOS capacitor with an n-type substrate. C-V curve for n-type Substrate (at low-frequency) A S J I 4 2 9

37. C-V curve with Frequency effects Figure 10.25a shows the MOS capacitor with a p-type substrate and biased in the inversion condition. We have argued that a differential change in the capacitor voltage in the ideal case causes a differential change in the inversion layer charge density. However , we must consider the source of electrons that produces a change in the inversion charge density. There are two sources of electrons that can change the charge density of the inversion layer. The first source is by diffusion of minority carrier electrons from the p-type substrate across the space charge region. The second source of electrons is by thermal generation of electron–hole pairs within the space charge region. Both of these processes generate electrons at a particular rate. The electron concentration in the inversion layer, then, cannot change instantaneously . A S J I 4 2 9

38. If the ac voltage across the MOS capacitor changes rapidly, the change in the inversion layer charge will not be able to respond. The C – V characteristics will then be a function of the frequency of the ac signal used to measure the capacitance . In the limit of a very high frequency, the inversion layer charge will not respond to a differential change in capacitor voltage. Figure 10.28 shows the charge distribution in the MOS capacitor with a p-type substrate. At a high-signal frequency, the differential change in charge occurs at the metal and in the space charge width in the semiconductor . The capacitance of the MOS capacitor is then , which we discussed earlier. The high-frequency and low-frequency limits of the C – V characteristics are shown in Figure 10.29. In general, high frequency corresponds to a value on the order of 1 MHz and low frequency corresponds to values in the range of 5 to 100 Hz. Typically , the high-frequency characteristics of the MOS capacitor are measured.   C-V curve with Frequency effects A S J I 4 2 9

39. Figure 10.28 | Differential charge distribution at inversion for a high-frequency differential change in gate voltage. C-V curve with Frequency effects Figure 10.29 | Low-frequency and high-frequency capacitance versus gate voltage of a MOS capacitor with a p-type substrate. A S J I 4 2 9

40. In all of the discussion concerning C – V characteristics so far, we have assumed an ideal oxide in which there are no fixed oxide or oxide–semiconductor interface charges. These two types of charges will change the C – V characteristics. We previously discussed how the fixed oxide charge affects the threshold voltage. This charge will also affect the flat-band voltage. The flat-band voltage from Equation (10.25) is given by   C-V curve with Fixed Oxide Charge Effects where is the equivalent fixed oxide charge and is the metal–semiconductor work function difference.   A S J I 4 2 9

41. Figure 10.30 | High-frequency capacitance versus gate voltage of a MOS capacitor with a p-type substrate for several values of effective trapped oxide charge. C-V curve with Fixed Oxide Charge Effects The flat-band voltage shifts to more negative voltages for a positive fixed oxide charge. Since the oxide charge is not a function of gate voltage, the curves show a parallel shift with oxide charge, and the shape of the C – V curves remains the same as the ideal characteristics. A S J I 4 2 9

42. The periodic nature of the semiconductor is abruptly terminated at the interface so that allowed electronic energy levels will exist within the forbidden bandgap . These allowed energy states are referred to as interface states. Charge can flow between the semiconductor and interface states, in contrast to the fixed oxide charge. The net charge in these interface states is a function of the position of the Fermi level in the bandgap . In general, acceptor states exist in the upper half of the bandgap and donor states exist in the lower half of the bandgap . C-V curve with Interface Charge Effects Figure 10.31 | Schematic diagram showing interface states at the oxide–semiconductor interface A S J I 4 2 9

43. C-V curve with Interface Charge Effects An acceptor state is neutral if the Fermi level is below the state and becomes negatively charged if the Fermi level is above the state . A donor state is neutral if the Fermi level is above the state and becomes positively charged if the Fermi level is below the state. The charge of the interface states is then a function of the gate voltage applied across the MOS capacitor. A S J I 4 2 9

44. Figure 10.32a shows the energy-band diagram in a p-type semiconductor of a MOS capacitor biased in the accumulation condition. In this case, there is a net positive charge trapped in the donor states. Now let the gate voltage change to produce the energy-band diagram shown in Figure 10.32b. The Fermi level corresponds to the intrinsic Fermi level at the surface; thus, all interface states are neutral. This particular bias condition is known as midgap . Figure 10.32c shows the condition at inversion in which there is now a net negative charge in the acceptor states. The net charge in the interface states changes from positive to negative as the gate voltage sweeps from the accumulation, depletion, to the inversion condition. C-V curve with Interface Charge Effects A S J I 4 2 9

45. We noted that the C – V curves shifted in the negative gate voltage direction due to positive fixed oxide charge. When interface states are present, the amount and direction of the shift change as we sweep through the gate voltage, since the amount and sign of the interface trapped charge change. The C – V curves now become “ smeared out ” as shown in Figure 10.33. C-V curve with Interface Charge Effects Figure 10.33 | High-frequency C–V characteristics of a MOS capacitor showing effects of interface states . A S J I 4 2 9

46. C-V curve with Interface Charge Effects Again, the C – V measurements can be used as a diagnostic tool in semiconductor device process control. For a given MOS device, the ideal C – V curve can be determined. Any “smearing out” in the experimental curve indicates the presence of interface states and any parallel shift indicates the presence of fixed oxide charge. The amount of smearing out can be used to determine the density of interface states. These types of measurement are extremely useful in the study of radiation effects on MOS devices. MATH Problems: 10.1 to 10.6 A S J I 4 2 9