Nanofabrication techniques

nanofabrication processess and its importance

1. NANOFABRICATION TECHNIQUES PRESENTED BY MOHSINA AFROOZ NT/M.TECH/2017-07

2. OUTLINES What is Nanofabrication ? Nanofabrication process Application Conclusion References

3. WHAT IS NANOFABRICATION? Nanofabrication refers to the design process of nanomaterial and devices that are measured in nanometers (0.1-100nm).

4. TECHNIQUES OF NANOFABRICATION Thin Film Deposition Physical vapor deposition Chemical vapor deposition Patterning i.e. Lithography Optical Lithography E-beam Lithography Film modification i.e. Etching Wet Etching Dry Etching

5. Typical nanofabrication Process

6. THIN FILM DEPOSITION A thin film is a layer of materials ranging from monolayer to several micrometer thickness It involves deposition of individual molecules or atoms

7. LITHOGRAPHY PROCEDURE Lithography consist of patterning substrate by employing the interaction of beams of photons or particles with materials

8. PHOTOLITHOGRAPHY PHOTO meaning light LITHO meaning stone GRAPHY meaning write That is ‘’PRINTING WITH LIGHT’’ Alphonse Poitevin invented this technique in 1855

9. ETCHING Process that removes material from surface after lithography is done Etching removes those part of substrate which was not masked It also removes the part of resist which was exposed to light to give fine patterns.

10. ETCHING

11. Application of nanofabrication “Size matters” Use in manufacturing of PCB, Microcontrollers, MOSFET, MEMS which are used in large scale in smartphones, computers and other electronic devices

12. References Introduction to Nanofabrication by ErliChen, Center for Imaging and Mesoscale Structure Harvard University Nano- fabrication,Richard Langford [email protected] Ex 2006 M.D. Austin H. Ge W. Wu M. Li Z. Yu D. Wasserman S.A. Lyon S‥Y Chou "Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography" < em >Appl. Phys. Lett.</ em > vol. 84 no. 26 pp. 5299 2004.