TELESIS ZYGO Surface Profiler Presentation Nov 09.pdf

TELESIS LASER

1. Telesis Confidential
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Zygo Surface Profiler
Measurement Capabilities
Telesis Application Lab – Fremont, Ca.

2. What Is A Zygo Surface Profiler and
What Does it Do?
•Zygo is the name of the manufacturer
•NewView 6000 Model
•Device is an optical microscope
•It uses waves of light to analyze variations in SURFACE
height or PROFILE
•Extremely high resolution
•Capable of measuring height variations of a few nanometer
to >1mm
•Nanometer = 10
-9
meters (1nm = 0.04 micro inches)



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3. The Instrument
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Microscope
Leveling
Platform
Air suspension Granite Base
Z-Axis Joy Stick
Live Video
Monitor
Data Analysis
Monitor

4. How Does it Work?
•Light comes from Microscope
•Passes through objective
•Illumintates surface
•Light is reflected back into
objective
•Light reflected from different
surface heights travels different
distances
•Zygo uses differences in light path
lengths to analyze surface profile
•Surface must have some level of
reflectivity
•Black anodized is OK
•Rusted or corroded steel is not OK

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Surface being analyzed
Incoming light
Reflected light
Microscope
Objective

5. Analysis Limitations
•Only light rays reflected
back into objective can be
analyzed
•If line is too narrow little or no light
is returned
•Recast in trenches scatters light
and limits analysis
•On some materials adding cleaning
pass can improve surface quality to
allow for better measurements
•Highly curved surfaces can be
difficult to measure
•Analysis program has capability of
correcting for some level of curvature
•There are size and height
limitations for parts to be measured
•Max part height ~70mm (2.75”)
•Max length and width ~30cm (12”)

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6. Surface Analysis – Black Anodized Al
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20kHz
Repetition
Rate
1”/S
10”/S
100”/S
200”/S
400”/S

7. Depth Measurement Engraved Line on
Aluminum - Part1
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•Engraving line on
400µm thick Aluminum
•Recast on edges and
narrow width limit
accuracy of depth
measurement

8. Depth Measurement Engraved Line on
Aluminum – Part 2
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Penetration of laser
•Allowing beam to pass
over edge of Al plate
reveals much deeper
mark and provides
more accurate
measurement
•Plate is 400µm thick
•Depth of mark is
~200µm

9. Annealed 2D Matrix on Stainless Steel
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•High contrast mark
•Minimal surface
damage
•Depth of mark only
2µm
•Unmarked surface
finish as much as
1.5µm deep

10. Engraved 2D Matrix on Stainless Steel
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•True engraving
•Max depth
45µm
•Measurement
at slice 28µm

11. Wide Scribe
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•600µm Wide
scribe
•Accurate depth
measurement
possible
•44µm deep

12. Final Word…Almost
•Zygo surface profiler is very power tool
•Must be used within its capabilities
•It can’t do everything
•Telesis is one of very few, if not the ONLY marking
company to have such a device
•Other companies have to go outside to contract for such a service
•Quite expensive and they are likely to charge a fee to their
customer for the service
•Can be upwards of $500/hour
•Telesis has yet to charge customers for its use
•Contact Mike Watts to discuss samples that need to be
evaluated to see if they are a suitable candidate for Zygo
analysis



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13. Final Word – SUCCESS!
•Thanks in part to the Zygo Surface Profiler, Telesis
recently won an order for an EV4G that will be used to
remove a VERY thin layer of gold from an electronic
component
•Zygo was used several times to measure depth of marks
and provided direction for the applications lab to tweak their
marking file to achieve the desired depth of mark and prove
the results to the customer

•It allows us to be one step closer to our customers by
allowing us to provide services not available from our
competitors!


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