White Light Interferometry 3D Surface Profiler

Application for 3D surface mapping with high image resolution and measurement. Targeting product having high surface flatness or needed high precision measurement for 3D surface.

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www.semilab.com
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6. Applicationexamples

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Critical dimension inspection of step-height
like profile

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Critical dimension of flat panel transistor

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1700 nm
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Solar cell wafer inspection of saw mark, surface roughness and fea tures.
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3000 nm
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Metal surface inspection of screatches, surface roughness and feat ures.
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400 nm
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1000 nm
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13. Recent WLI demo result: spacers height in FPD
structures
6000 nm
www.semilab.com
9/21/201513
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14. MeasurementsPositions
Repeatibilitymeasurement
www.semilab.com
9/21/201514
The Critical dimensions (Top and Bottom) are measured along the yellow axes
(nm)

15. 3D view of FPD structures
www.semilab.com
15

16. Applicationexamples
Surfaceroughness

17. 935575/4
200 nm
www.semilab.com
17
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18. Surface roughness and waviness
200 nm
RMS=4.797 nm
www.semilab.com
18
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RMS=36.273 nm

19. Surface roughness and waviness II.
RMS=4.797 nm
www.semilab.com
19
RMS=36.273 nm

20. 9355755/128
250 nm
www.semilab.com
20
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21. Surface roughness and waviness
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www.semilab.com
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22. RMS=9.433 nm
www.semilab.com
22
RMS= 27.298 nm

23. 934344/4
250 nm
www.semilab.com
23
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24. Surface roughness and waviness
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www.semilab.com
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25. RMS=7.762
www.semilab.com
25
RMS= 36.554

26. 934344/128
400 nm
www.semilab.com
26
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27. Surface roughness and waviness
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www.semilab.com
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28. RMS=28.122nm
www.semilab.com
28
RMS= 50.088 nm

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www.semilab.com
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