Pressure monitoring inside vacuum chamber using LABVIEW
Timing Diagram for Operation state MPS Time(in second) RG Generator Matching Network Diagnostics system t=t1 System t=t2 t=t2 +30 t=t1 + 40 Ready sequence Operation- Multiple plasma shots of 30 sec Shutdown sequence
Timing Diagram for Operation state MPS Time(in second) RG Generator Matching Network Diagnostics system t=t1 System t=t2 t=t2 +30 t=t1 + 40 Ready sequence Operation- Multiple plasma shots of 30 sec Shutdown sequence
Timing Diagram for OFF Sequence– Shutdown state MFC Time(in second) Gate Valve TMP Compressor Rotary Pump Vacuum Gauge Chiller For TMP t=5 t=t1 t=t1+25 t=10 t=t1+20 t=t1+30 TMP is switched OFF when Pump speed becomes zero t=t1+35 System Stop Signal When all the system successfully stopped
Controller Sensing Element Process Σ Σ Actual Pressure, Pump speed Reference Pump speed, Pressure ON/OFF SEQUENCE Comparison Block
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ON sequence:- Flow diagram:- If pressure is 1000 mbar then Switch ON rotary Pump and Then Compressor and then Gate Valve Electroneumatic gate valve is ON when electric signal(230V) and pneumatic signal(from compressor) is ON, And, If differential pressure is 20 mbar (Either side of Gate valve- Main vessel and Connection Line) Then Gate valve in open condition. 3. Position indicator of gate valve is used to know whether gate valve is open /close. 4. Then TMP Power supply is switched on using DO of PLC and Relay contact 5. TMP power supply is ON, 6. Using TMP remote connector(26 pin) DO remote priority DI remote priority Pumping station ON--- based on Pressure inside vessel Motor pump----- Switched ON after roughing vacuum is achieved(Currently ) Delayed switching ON (Backing Pump) after 6Hz OR continuous Operation Delayed Switching ON based on Pressure inside vessel main line or connection line Actual rotation speed Pin 1,pin26------ Output or Input Pin. Pin 8--- Rotation switch point attained or rotation speed attained??---- TMP ready D02----- No error (supply voltage established) Pin 18,19,20------ Status signal of operation is malfunction free. Analog Signal continuously monitored and if maximum speed attained then TMP ready signal. Better vacuum is achieved using fore vacuum based switching .
Operation sequence for fine tunning :- Two signal to monitor:- Turbo Molecular Pump Speed Chamber Pressure Ready state of operation:- 1. Pressure inside vessel is monitored using Gauge
ON sequence:- Flow diagram:- Switch ON the CHILLER_ TMP After TMP is ON After High vacuum is achieved (9 * 10^(-6)) :--------- .
RF plasma is best suited to make at pressure of 5 * 10^(-3) mbar So, if MFC switched ON/OFF intermittently for every plasma shot Plasma shot is taken only at pressure= 5*10^(-3) for better plasma density, flow and Temperature.
Switch OFF sequence Cutoff Gas Supply (MFC turned OFF) After 5 sec, Gate Valve is turned OFF Motor pump turned off Pumping station turned off Error signal monitored(relays 2) Rotation speed monitored If rotation speed is ZERO-------> Then, TMP is turned OFF after 5 sec RP is turned OFF after 10 sec Compressor is turned OFF after 15 sec Vacuum Gauge is turned OFF after 20 sec Chiller for TMP turned OFF after 25 sec DC supply is turned OFF